4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Binh Bui

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Apparatus and method for generating plasma

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Quartz pin lift for single wafer chemical vapor...

Material or article handling – Elevator or hoist and loading or unloading means therefor – Comprising means enabling additional movement of carrier or...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1585821

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