4. Optics: measuring and testing
  5. By alignment in lateral direction
  6. With registration indicia

Bernhard Liegl

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Alignment system and method using bright spot and box structure

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Intra-cell mask alignment for improved overlay

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Having substrate registration feature
Reexamination Certificate

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Sub-resolution sized assist features

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2759212

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