4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Bernard F. Harrison

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Ion implantation apparatus having increased source lifetime

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Ion implantation having increased source lifetime

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Ion implantation having increased source lifetime

Electric lamp and discharge devices – With positive or negative ion acceleration
Patent

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Profile ID: LFUS-PAI-P-62716

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