4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Mixture of vapors or gases utilized

Barbara Fröschle

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Method for producing a titanium monophosphide layer and its use

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate

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Method of producing a semiconductor surface covered with...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-2482868

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