4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Balzers und Leybold

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Apparatus for drawing single crystals by the czochralski method

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – With means for measuring – testing – or sensing
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Method and apparatus for coating substrates in a vacuum chamber,

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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