4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Electron beam imaging

Balasubramanian S. Pranatharthi Haran

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Method and process for forming a self-aligned silicide contact

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Mixed lithography with dual resist and a single pattern...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging
Reexamination Certificate

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