4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Axel Walter

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Device for measuring quantities of heat while simultaneously...

Thermal measuring and testing – Transformation point determination – Between gaseous and liquid states
Reexamination Certificate

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High-density plasma etching of carbon-based low-k materials...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2016011

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