4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Atsushi Kinomura

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Laser ablation type ion source

Radiant energy – Ion generation – Field ionization type
Utility Patent

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Method for extracting ion current from space of high vacuum into

Radiant energy – Radiation controlling means
Patent

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Method of forming a highly pure thin film and apparatus therefor

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Surface hardened resins for disk substrates, methods of...

Coating processes – Direct application of electrical – magnetic – wave – or... – Ion plating or implantation
Reexamination Certificate

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Profile ID: LFUS-PAI-P-943415

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