4. Coating apparatus
  5. Work holders, or handling devices

Atsumi Ito

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Wafer boat and film formation method

Coating apparatus – Work holders – or handling devices
Patent

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Wafer boat and film formation method

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1128995

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