4. Electric heating
  5. Heating devices
  6. Combined with container, enclosure, or support for material...

ASML US, Inc.

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Apparatus, system, and method for active compensation of...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Chemical mechanical polishing of copper-oxide damascene...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Chemical vapor deposition system

Coating processes – Coating by vapor – gas – or smoke
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Device for handling wafers in microelectronic manufacturing

Material or article handling – Load carried along a horizontal linear path – Having gripper means
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Flexible piezoelectric chuck and method of using the same

Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
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