4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With microwave gas energizing means

Arthur W. Zafiropoulo

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Electrically conductive structure on a semiconductor...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Integrated processing system having multiple reactors...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Integrated processing system having multiple reactors...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Method providing multiple-processing of substrates

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent

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Multi-planar electrode plasma etching

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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Profile ID: LFUS-PAI-P-689345

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