4. Optics: measuring and testing
  5. Lamp beam direction or pattern

Anton Barty

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Method for the manufacture of phase shifting masks for EUV...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Phase determination of a radiation wave field

Optics: measuring and testing – Lamp beam direction or pattern
Reexamination Certificate

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Phase determination of a radiation wave field

Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2838886

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