4. Radiation imagery chemistry: process, composition, or product th
  5. Including control feature responsive to a test or measurement

Anna M. Minvielle

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Method and apparatus for compensating for critical dimension...

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Method of characterizing linewidth errors in a scanning lithogra

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
Patent

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Methods for designing grating structures for use in situ...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Multilayer low reflectivity hard mask and process therefor

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1391564

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