Coating processes
Electrical product produced
Metallic compound coating
Inventor
active
Apparatus for depositing a thin layer of sputtered atoms on a me
Apparatus for, and method of, depositing a film on a substrate
Apparatus for, and method of, depositing a film on a substrate
Cluster tool with a hollow cathode array
Method of depositing materials on a wafer to eliminate the effec
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Profile ID: LFUS-PAI-P-770118