4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Andrew J. Perry

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Method for controlling a recess etch process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method for in-situ monitoring of patterned substrate...

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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Methods and apparatus for physical vapor deposition

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Utility Patent

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Profile ID: LFUS-PAI-P-2031077

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