4. Electric heating
  5. Metal heating
  6. By arc

Andreas Gortler

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Apparatus for purging the beam path of a UV laser beam

Electric heating – Metal heating – By arc
Reexamination Certificate

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Device for flushing the optical path of a UV laser beam

Electric heating – Metal heating – By arc
Reexamination Certificate

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Excimer laser

Coherent light generators – Particular resonant cavity – Specified cavity component
Reexamination Certificate

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F2-laser with line selection

Coherent light generators – Particular beam control device – Mode discrimination
Reexamination Certificate

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F2-laser with line selection

Coherent light generators – Particular active media – Gas
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2510974

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