4. Semiconductor device manufacturing: process
  5. Including control responsive to sensed condition
  6. Electrical characteristic sensed

Anand Reddy

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Reduction of punch-thru defects in damascene processing

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Sensitive test structure for assessing pattern anomalies

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Electrical characteristic sensed
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2885973

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