4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. With detector

Allen M. Carroll

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Border modification for proximity effect correction in...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging
Reexamination Certificate

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Electron beam patterning

Computer-aided design and analysis of circuits and semiconductor – Design of semiconductor mask or reticle – Layout generation
Reexamination Certificate

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Specimen distance measuring system

Radiant energy – With charged particle beam deflection or focussing – With detector
Patent

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Virtual addressing for E-beam lithography

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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