4. Electrical transmission or interconnection systems
  5. Nonlinear reactor systems
  6. Parametrons

Allen L. Evans

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Control mechanism for matching process parameters in a...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Feedback control of deposition thickness based on polish...

Semiconductor device manufacturing: process – With measuring or testing
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Interlayer between titanium nitride and high density plasma...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Method and apparatus for determining measurement frequency...

Electricity: measuring and testing – Impedance – admittance or other quantities representative of...
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Method and apparatus for reducing deposition variation by...

Data processing: measuring – calibrating – or testing – Measurement system – Temperature measuring system
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