Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
Inventor
active
Composite sputter target and phosphor deposition method
Reactive metal sources and deposition method for...
Silicon oxynitride passivated rare earth activated...
Single source sputtering of thioaluminate phosphor films
Single source sputtering of thioaluminate phosphor films
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Profile ID: LFUS-PAI-P-2441876