4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Alexander Gurary

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Apparatus and method for controlling temperature uniformity...

Electric heating – Heating devices – With power supply and voltage or current regulation or...
Reexamination Certificate

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Apparatus for depositing a coating on a substrate

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
Patent

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Apparatus for depositing a coating on a substrate

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Apparatus for growing epitaxial layers on wafers by chemical...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
Reexamination Certificate

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Calibration wafer and method of calibrating in situ...

Thermal measuring and testing – Thermal calibration system
Reexamination Certificate

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Profile ID: LFUS-PAI-P-388003

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