4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Alexander G. Gayka

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Methods of reducing corrosion of materials, methods of...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Process for forming a semiconductor device and a process for...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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