4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron microscope type

Alden Acheta

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Materials and methods for sublithographic patterning of gate...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Polarization measurement device and method

Optics: measuring and testing – By polarized light examination – Of surface reflection
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SEM inspection and analysis of patterned photoresist features

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2761888

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