4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Mixture of vapors or gases utilized

Akifumi Masuko

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Process for forming metal oxide film by means of CVD system

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent

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Process of producing a ruthenium or ruthenium oxide thin film

Coating processes – Direct application of electrical – magnetic – wave – or... – Chemical vapor deposition
Reexamination Certificate

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Profile ID: LFUS-PAI-P-202962

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