4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Responsive to non-electrical signal
  6. Magnetic field

Advanced Microsensors

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MEMS devices and methods for inhibiting errant motion of...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Magnetic field
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MEMS devices and methods of manufacture

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Magnetic field
Reexamination Certificate

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MEMS devices and methods of manufacture

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
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