4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Advanced Ion Beam Technology Inc.

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Apparatus and method for reducing energy contamination of...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Apparatus and method for reducing implant angle variations...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Apparatus and method for reducing space charge of ion beams...

Electric heating – Metal heating – By arc
Reexamination Certificate

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Apparatus and method for uniformly depositing thin films...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Apparatus for decelerating ion beams with minimal energy...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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