Wave transmission lines and networks
Long line elements and components
Switch
Inventor
active
CMOS-compatible MEM switches and method of making
CMOS-compatible MEM switches and method of making
Design and fabrication of broadband surface-micromachined micro-
Fabrication of broadband surface-micromachined...
Fabrication process for Al.sub.x In.sub.1-x As/Ga.sub.y In.sub.1
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