Interferometric modulation

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

359579, 359584, 359589, 345 84, 345 85, G02B 2600, G02B 2700, G02B 110, G02B 528, G09G 334

Patent

active

060550902

ABSTRACT:
An interferometric modulator (Imod) cavity has a reflector and an induced absorber. A direct view reflective flat panel display may include an array of the modulators. Adjacent spacers of different thicknesses are fabricated on a substrate by a lift-off technique used to pattern the spacers which are deposited separately, each deposition providing a different thickness of spacer. Or a patterned photoresist may be used to allow for an etching process to selectively etch back the thickness of a spacer which was deposited in a single deposition. A full-color static graphical image may be formed of combined patterns of interferometric modulator cavities. Each cavity includes a reflector, and an induced absorber, the induced absorber including a spacer having a thickness that defines a color associated with the cavity.

REFERENCES:
patent: 2534846 (1950-12-01), Ambrose et al.
patent: 3439973 (1969-04-01), Paul et al.
patent: 3443854 (1969-05-01), Weiss
patent: 3653741 (1972-04-01), Marks
patent: 3656836 (1972-04-01), de Cremoux et al.
patent: 3813265 (1974-05-01), Marks
patent: 3955880 (1976-05-01), Lierke
patent: 4099854 (1978-07-01), Decker et al.
patent: 4228437 (1980-10-01), Shelton
patent: 4377324 (1983-03-01), Durand et al.
patent: 4389096 (1983-06-01), Hori et al.
patent: 4403248 (1983-09-01), Te Velde
patent: 4445050 (1984-04-01), Marks
patent: 4519676 (1985-05-01), te Velde
patent: 4531126 (1985-07-01), Sadones
patent: 4663083 (1987-05-01), Marks
patent: 4681403 (1987-07-01), te Velde et al.
patent: 4748366 (1988-05-01), Taylor
patent: 4786128 (1988-11-01), Birnbach
patent: 4790635 (1988-12-01), Apsley
patent: 4982184 (1991-01-01), Kirkwood
patent: 5022745 (1991-06-01), Zahowski et al.
patent: 5044736 (1991-09-01), Jaskie et al.
patent: 5075796 (1991-12-01), Schildkraut et al.
patent: 5078479 (1992-01-01), Vuilleumier
patent: 5124834 (1992-06-01), Cusano et al.
patent: 5153771 (1992-10-01), Link et al.
patent: 5168406 (1992-12-01), Nelson
patent: 5231532 (1993-07-01), Magel et al.
patent: 5233459 (1993-08-01), Bozler et al.
patent: 5311360 (1994-05-01), Bloom et al.
patent: 5381253 (1995-01-01), Sharp et al.
patent: 5401983 (1995-03-01), Jokerst et al.
patent: 5459610 (1995-10-01), Bloom et al.
patent: 5497172 (1996-03-01), Doherty et al.
patent: 5500635 (1996-03-01), Mott
patent: 5500761 (1996-03-01), Goossen et al.
patent: 5579149 (1996-11-01), Moret et al.
patent: 5619059 (1997-04-01), Li et al.
patent: 5636052 (1997-06-01), Arney et al.
patent: 5703710 (1997-12-01), Brinkman et al.
patent: 5710656 (1998-01-01), Goosen
patent: 5739945 (1998-04-01), Tayebati
patent: 5784190 (1998-07-01), Worley
patent: 5825528 (1998-10-01), Goosen
Aratani, et al., "Surface micromachined tuneable interferometer array", Sensors and Actuators, 1994, pp. 17-23.
"Light Over Matters", Jun. 1993, Circle No. 36.
Miles, Mark, W., "A New Reflective FPD Technology Using Interferometric Modulation", Society for Information Display '97 Digest, Session 7.3.
Newsbreaks, "Quantum-trench devices might operate at terahertz frequencies", Laser Focus World May 1993.
Winton, John M., "A novel way to capture solar energy", Chemical Week, May 15, 1985.
Jerman et al., "A Miniature Fabry-Perot Interferometer with a Corrugated Silicon Diaphragm Support", Sensors and Actuators A, vol. 29, p. 151, 1991.
Raley et al., "A Fabry-Perot Microinterferometer for Visible Wavelengths", IEEE Solid-State Sensor and Actuator Workshop, Jun. 1992, Hilton Head, SC.
Aratani, et al., "Process and Design COnsiderations for Surface Micromachined Beams for a Tuneable Interferometer Array in Silicon", Proc. IEEE Microelectromechanical Workshop, Fort Lauderdale, FL, Feb. 7-10, p. 230, 1993.
Walker, et al., "Electron-beam-tunable Interference Filter Spatial Light Modulator", Optics Letters vol. 13, No. 5, p. 345, 1988.
Goosen et al., "Silicon Modulator Based on Mechanically-Active Anti-Reflection Layer with 1Mbit/sec Capability for Fiber-in-the-Loop Applications", IEEE Photonic Technology Letters, Sep. 1994.
Goosen et al., "Possible Display Applications of the Silicon Mechanical Anti-Reflection Switch", Society for Information Display, 1994.
Sperger et al., "High Performance Patterned All-Dielectric Interference Colour Filter for Display Applications", SID Digest 1994.
Conner, "Hybrid Color Display Using Optical Interference Filter Array", SID Digest 1993, pp. 577-580.
Wu, "Design of a Reflective Color LCD Using Optical Interference Reflectors", ASIA Display '95, Oct. 16, pp. 929-931.
Johnson, "Optical Scanners", Microwave Scanning Antennas, vol. 1, p. 251 et seq. (1964).
Oliner, "Radiating Elements and Mutual Coupling", Microwave scanning Antennas, vol. 2, p. 131 et seq. (1966).
Akasaka, "Three-Dimensional IC Trends", Proceedings of IEEE, vol. 74, No. 12, Dec. 1986, pp. 1703-1714.
Stone, "Radiation and Optics, An Introduction to the Classical Theory", McGraw-Hill, pp. 340-343. (1963).
Gosch, "West Germany Graps the Lead in X-Ray Lithography", Electronics, Feb. 5, 1987, pp. 78-80.
Howard, "Nanometer-Scale Fabrication Techniques", VLSI Electronics: Microstructure Science, vol. 5, 1982, pp. 145-153, pp. 166-173.
Jackson, "Classical Electrodynamics", John Wiley & Sons Inc., pp. 568-573. (No Date Available).

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Interferometric modulation does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Interferometric modulation, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Interferometric modulation will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-998219

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.