Semiconductor processing systems

Details Semiconductor processing systems Semiconductor processing systems

1995-04-03

1997-10-21

Bennett, Henry A.

Drying and gas or vapor contact with solids

Apparatus

With apparatus using centrifugal force

34312, 414938, F26B 1724

Patent

active

056783205

ABSTRACT:
A processor for processing semiconductor articles, such as integrated circuit wafers, flat panel displays, semiconductor substrates, and data disks. The processor has an interface section which receives articles in article carriers. The interface section transfers the articles from carriers into processing arrays. A conveyor having an automated arm assembly moves article arrays to and between processing stations. The processing stations are accessed from an enclosed area adjoining the interface section.

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