Patent
1990-07-13
1991-10-15
Hille, Rolf
357 71, 357 59, H01L 2140
Patent
active
050578995
ABSTRACT:
A semiconductor device includes a semiconductor layer, an insulating layer on the semiconductor layer, including a discontinuity therein, a monocrystalline silicon layer on a portion of semiconductor layer defined by the discontinuity, a non-monocrystalline silicon layer on the monocrystalline silicon layer, and a wiring layer on the non-monocrystalline silicon layer.
REFERENCES:
patent: 3681668 (1972-08-01), Kobayashi
patent: 4563807 (1986-01-01), Sakai et al.
"Low-Resistive and Selective Silicon Growth as a Self-Aligned Contact Hole Filler and its Application to 1M bit Static RAM", Shibata et al., pp. 75-76.
Solid State Technology/Aug. 1985, pp. 141-148; "Advanced Dielectric Isolation Through Selective Epitaxial Growth Techniques", Borland et al.
Matsushita Yoshiaki
Samata Shuichi
Clark S. V.
Hille Rolf
Kabushiki Kaisha Toshiba
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