Scalable high dielectric constant capacitor

Details Scalable high dielectric constant capacitor Scalable high dielectric constant capacitor

1999-05-18

2000-12-26

Niebling, John F.

Semiconductor device manufacturing: process

Having magnetic or ferroelectric component

438393, 438396, 438253, 438240, H01L 2100

Patent

active

061658049

ABSTRACT:
A capacitor for high density DRAM applications comprises a high-.di-elect cons. capacitor dielectric such as BST or PZT in an arrangement which obviates the need for barrier layers during fabrication. The fabrication process allows for electrode placement by simple sputter deposition and further provides for the possibility of capacitor spacing below that of conventional lithographic techniques.

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