Process for producing ohmic electrode for p-type cubic system bo

Details Process for producing ohmic electrode for p-type cubic system bo Process for producing ohmic electrode for p-type cubic system bo

1990-10-23

1991-10-15

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437189, 437192, 148DIG113, H01L 21283

Patent

active

050574540

ABSTRACT:
A process for producing an ohmic electrode for p-type cBN is disclosed, which process comprises the steps of: providing a thin alloy film composed of Au and Be, the weight ratio of Be being from 0.1 to 15% by weight, on p-type cBN; providing a thin film of a metal selected from Ni, Cr, Mo, and Pt on the thin alloy film; and subjecting the p-type cBN having the films thus provided to a heat-treatment in an inert gas or in vacuo at a temperature of from 350.degree. C. to 600.degree. C.

REFERENCES:
patent: 3769694 (1973-11-01), Collins et al.
patent: 3850688 (1974-11-01), Halt
patent: 4875967 (1989-10-01), Mishima et al.
Hasenberg, T. C., et al., "An Improved . . . ", J. Appl. Phys., vol. 61, No. 2, 15 Jan. 1987, pp. 808-809.
Keramidas, V. G., et al., "Metallurgical Interactions . . . ", Thin Solid Films, vol. 96, 1982, pp. 347-363.
Piotrowska, A., et al., "Gold-Based . . . ", Thin Solid Films, vol. 130, 1985, pp. 231-236.

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