Method of fabricating polysilicon emitters for solar cells

Details Method of fabricating polysilicon emitters for solar cells Method of fabricating polysilicon emitters for solar cells

1990-02-12

1991-10-15

Weisstuch, Aaron

Fishing, trapping, and vermin destroying

136256, 357 30, 357 65, 437 4, 437186, H01L 3118

Patent

active

050574396

ABSTRACT:
Polysilicon contacts for silicon devices such as bipolar junction transistors and silicon solar cells are fabricated in a two step anneal process to improve contact resistance and emitter saturation current density. After a silicon oxide layer is formed on a surface of a silicon substrate, a plurality of openings are formed there through to expose a plurality of contact surfaces on the surface of the silicon substrate. A thin thermally grown silicon oxide layer is then formed on the contact surfaces after which an undoped layer of polysilicon material is formed over the silicon oxide layers. The structure is then annealed at approximately 1050.degree. C. to break the thermally grown silicon oxide layer. Thereafter, a first layer of doped glass is formed over the silicon oxide surface and selectively etched to remove the first layer of glass from a first group of contact surfaces. A second layer of doped glass is then formed over the first group of contact surfaces and over the first layer of doped glass. Thereafter, the silicon substrate is annealed at a temperature of approximately 900.degree. C. thereby driving in dopants from said first and second layers of glass into said polysilicon layer over said first and second groups of contact surfaces. Finally, the layers of glass are removed and the polysilicon layer is patterned to define first and second polysilicon contacts.

REFERENCES:
patent: 4403392 (1983-09-01), Oshima et al.
patent: 4502206 (1985-03-01), Schnable et al.
R. A. Sinton et al., IEEE Trans. Electron Dev., vol. ED-34, Oct. 1987, pp. 2116-2123.
Y. Kwark et al., Conference Record, 18th IEEE Photovoltaic Specialists Conf. (1985), pp. 787-791.
F. A. Lindholm et al., Conference Record, 18th IEEE Photovoltaic Conference (1985), pp. 1003-1007.

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