Fabrication of moly masks by electroetching

Details Fabrication of moly masks by electroetching Fabrication of moly masks by electroetching

1994-08-03

1995-12-19

Valentine, Donald R.

Chemistry: electrical and wave energy

Processes and products

Electrostatic field or electrical discharge

20412955, 20412965, 2041297, 20412975, 20412995, 204224M, C25F 302, C25F 700

Patent

active

054765757

ABSTRACT:
Masks for microelectronics technology are fabricated by electrochemical etching. Molybdenum sheet or foil is masked with patterned photoresist on one side, and a mating, mirror-image pattern of photoresist is applied on the other side of the foil in exact registration with the first pattern. The foil is immersed in electrolyte (an aqueous solution of sodium nitrate, sodium hydroxide, thiourea, and surfactant) along with nickel anode plates held parallel to the foil surfaces 1-3 cm away. The anode plate is made slightly smaller than the mask area of the foil. When voltage is applied across the cell, the foil is etched through to form vias. The electrolyte is pumped across the surface of the foil and uniform flow velocity over the foil surface is achieved.

REFERENCES:
patent: 4045312 (1977-08-01), Satoshi
patent: 4082632 (1978-04-01), Whittle
patent: 4110190 (1978-08-01), Visser
patent: 4119514 (1978-10-01), Whittle
patent: 4208257 (1980-06-01), Hom-ma et al.
patent: 4212907 (1980-07-01), Wright
patent: 4628588 (1986-12-01), McDavid
B. Braren et al., "One Step Mask Making", Research Disclosure, Kenneth Mason Publications Ltd. (Sep. 1990).
W. B. Pennenbaker, "Electropolishing of Metal-Film Structures", IBM Technical Disclosure Bulletin, vol. 14, No. 10, pp. 3023-3025, Mar. 1972.

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