Method for producing an electrostatic actuator and an inkjet hea

Details Method for producing an electrostatic actuator and an inkjet hea Method for producing an electrostatic actuator and an inkjet hea

1999-08-05

2000-12-26

Nguyen, Thinh

Incremental printing of symbolic information

Ink jet

Ejector mechanism

347 68, 298901, B41J 204, B41J 2045, B21D 5300

Patent

active

061647594

ABSTRACT:
A manufacturing method for a device having an electrostatic actuator for example inkjet head, whereby warping of the diaphragms does not occur as a result of anodic bonding is provided. The method comprises the steps of etching a first substrate on the first surface thereof to form a concave portion and a diaphragm provided in bottom walls of the concave portion, forming an electrode on a second substrate, and anodically bonding the second substrate to a second surface of the first substrate, opposite the first surface, such that the electrode is aligned adjacent to the diaphragm with a gap therebetween. The bonding temperature of the anodically bonding step is set within a temperature range whereby the contraction of the first substrate after bonding is equal to or greater than the contraction of the second substrate.

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