Force detector

Details Force detector Force detector

1998-07-02

2000-04-25

Chilcot, Richard

Measuring and testing

Dynamometers

Responsive to multiple loads or load components

G01D 700

Patent

active

06053057&

ABSTRACT:
An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is connected. Then, by cutting the second substrate, a working body and a pedestal are formed. On the other hand, a groove is formed on a third substrate. An electrode layer is formed on the bottom surface of the groove. The third substrate is connected to the first substrate so that both the electrodes face to each other with a predetermined spacing therebetween. Finally, the first, second and third substrates are cut off every respective unit regions to form independent sensors, respectively. When an acceleration is exerted on the, working body, the first substrate bends. As a result, the distance between both the electrodes changes. Thus, an acceleration exerted is detected by changes in an electrostatic capacitance between both the electrodes.

REFERENCES:
patent: 3509583 (1970-05-01), Fraioli
patent: 3952234 (1976-04-01), Birchall
patent: 4175428 (1979-11-01), Eilersen
patent: 4261086 (1981-04-01), Giachino et al.
patent: 4373394 (1983-02-01), Beloglazov et al.
patent: 4373399 (1983-02-01), Beldglazov et al.
patent: 4384899 (1983-05-01), Myers
patent: 4454771 (1984-06-01), Shimazoe et al.
patent: 4542436 (1985-09-01), Carusillo
patent: 4552028 (1985-11-01), Burckhardt et al.
patent: 4586109 (1986-04-01), Peters et al.
patent: 4615105 (1986-10-01), Wada et al.
patent: 4680606 (1987-07-01), Knutti et al.
patent: 4719538 (1988-01-01), Cox
patent: 4853894 (1989-08-01), Yamanaka et al.
patent: 4855866 (1989-08-01), Imamura et al.
patent: 4864463 (1989-09-01), Shkedi
patent: 4891985 (1990-01-01), Glenn
patent: 4905523 (1990-03-01), Okada
patent: 4910840 (1990-03-01), Sprenkels et al.
patent: 4967605 (1990-11-01), Okada
patent: 4969366 (1990-11-01), Okada
patent: 5014415 (1991-05-01), Okada
patent: 5035148 (1991-07-01), Okada
patent: 5054323 (1991-10-01), Hubbard, Jr. et al.
patent: 5092645 (1992-03-01), Okada
patent: 5182515 (1993-01-01), Okada
patent: 5263375 (1993-11-01), Okada
patent: 5295386 (1994-03-01), Okada
patent: 5317922 (1994-06-01), Bomback et al.
patent: 5343765 (1994-09-01), Okada
patent: 5365799 (1994-11-01), Okada
patent: 5392658 (1995-02-01), Okada
patent: 5406848 (1995-04-01), Okada
patent: 5421213 (1995-06-01), Okada
patent: 5437196 (1995-08-01), Okada
patent: 5492020 (1996-02-01), Okada
patent: 5497668 (1996-03-01), Okada
patent: 5531002 (1996-07-01), Okada
patent: 5531092 (1996-07-01), Okada
patent: 5571972 (1996-11-01), Okada
patent: 5639973 (1997-06-01), Okada
patent: 5646346 (1997-07-01), Okada
patent: 5661235 (1997-08-01), Bonin
patent: 5668318 (1997-09-01), Okada
patent: 5682000 (1997-10-01), Okada
patent: 5744718 (1998-04-01), Okada
patent: 5780749 (1998-07-01), Okada
patent: 5786997 (1998-07-01), Hoyt et al.
R.F. Wolffenbuttel et al. "Multiaxis Compliant Capacitive . . . " IEEE Instrumentation and Measurement Technology Conference San Jose, California, 1990, pp. 54-59.
Patent Abstracts of Japan, vol. 014, No. 366 (P-1089) Aug., 1990.
Patent Abstracts of Japan, vol. 013, No. 266 (P-887) Jun. 20, 1989.
Patent Abstracts of Japan, vol. 010, No. 177 (p-470) Jun. 21, 1986.
Patent Abstracts of Japan, vol. 015, No. 311 (E-1098) Aug., 1991.
Patent Abstracts of Japan, vol. 10, No. 45, Feb. 21, 1986, p. 430.
Patent Abstracts of Japan, vol. 7, No. 38, Feb. 16, 1983, p. 176.
Patent Abstracts of Japan, vol. 10, No. 256, Sep. 2, 1986, p. 493.
Peterson, K., Transducers '85, International Conference on Solid-state Sensors an Actuators, "A force sensing chip . . . ", 1985, pp. 30-32.
Suzuki, M. et al., Proceedings.
IECON '86, International Conference on Industrial Electronics, Control and Instrumentation, "Three Kinds of Dexterous . . . ", Milwaukee, Wis., pp. 544-548.
Patent Abstracts of Japan, vol. 012, No. 351 (E-660), Sep. 20, 1988, for JP 63108763A.
Patent Abstracts of Japan, vol. 013, No. 410(E-819), Sep. 11, 1989, for JP 01150383A.
Patent Abstracts of Japan, vol. 011, No. 179 (E-514), Jun. 9, 1987, for JP 62011257A.
Patent Abstracts of Japan, vol. 015, No. 101 (E-1068), May 16, 1991, For JP 03050809A.
Patent Abstracts of Japan, vol. 015, No. 405 (E-1122), Oct. 16, 1991, For JP 03165552A.
Patent Abstracts of Japan, vol. 11, No. 58, Feb. 21, 1987, p. 550.
Patent Abstracts of Japan, vol. 9, No. 6, Jan. 11, 1985.
N.T.I.S. Technical Notes, "Force Sensor . . . ", Part F, Feb. 1986, p. 188.

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