Method for detecting displacement of semiconductor device

Details Method for detecting displacement of semiconductor device Method for detecting displacement of semiconductor device

1982-06-18

1985-06-18

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

356400, G21K 510

Patent

active

045242801

ABSTRACT:
The invention discloses a method for detecting a relative positional relation between the coordinate systems of a semiconductor device such as an IC memory and a laser system for cutting a desired wiring pattern. The detecting method according to this invention comprises the steps of scanning a cross-shaped diffusion layer formed on a silicon wafer with a laser beam in a square shape, detecting a change in a current generated when the laser beam crosses the diffusion layer, defining two points at which the current abruptly increases in the X- and Y-axes of the coordinate system of the wafer, respectively, and calculating a reference point (origin) of the coordinate system of the silicon wafer by calculating an intersection of virtual diagonals of a virtual square the four corners of which correspond to the four points in the X- and Y-axes.

REFERENCES:
patent: 3989385 (1976-11-01), Dill et al.
patent: 4213117 (1980-07-01), Kembo et al.
patent: 4315201 (1982-02-01), Suzuki et al.
patent: 4328553 (1982-05-01), Fredriksen et al.
patent: 4406949 (1983-09-01), Spohnheimer
"A Fault-Tolerant 64K Dynamic Random-Access Memory", (R. P. Cenker et al.), IEEE Transactions on Electron Devices, Vo. ED-26, No. 6, Jun. 1979.

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