Electric heating – Metal heating – By arc
Patent
1983-09-19
1985-06-18
Albritton, C. L.
Electric heating
Metal heating
By arc
2504411, B23K 1500
Patent
active
045242615
ABSTRACT:
Localized vacuum envelope apparatus includes a housing member having a bottom plate with a downwardly extending first sleeve and an upwardly extending flange. The flange includes ports for vacuum pumping and is adapted for attachment to an electron beam column. The apparatus further includes a lower plate having a second downwardly extending sleeve and an upper plate having a third downwardly extending sleeve. The first, second and third sleeves, which can have a truncated conical shape and are concentric, define vacuum zones. Channels are provided for connecting the vacuum zones to individual ports. The tips of the sleeves are coplanar and form the tip of the vacuum envelope. A noncontacting graded vacuum seal is formed between the tip of the vacuum envelope and a workpiece. The housing member and the upper plate can be ferromagnetic material to provide double magnetic shielding.
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Lewis et al., "A Laser Interferometer Controlled X,Y Air Bearing for Direct Wafer Exposure Electron Beam Lithography," Proc. 10th Int. Conf. on Electron and Ion Beam Science and Technology, p. 477, (1982).
Fox, "Planar Vacuum Seal for Isolating an Air Bearing," U.S. Ser. No. 107,207, filed Dec. 16, 1979, (Corresponding PCT Appl. No. US80/01718, published Jul. 8, 1982).
Foley Michael S.
Petric Paul F.
Albritton C. L.
Cole Stanley Z.
McClellan William R.
Varian Associates Inc.
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