Metal working – Piezoelectric device making
Patent
1996-02-16
1998-05-12
Vo, Peter
Metal working
Piezoelectric device making
295272, 29600, 20419218, 216 2, 216 24, 385 2, 385132, 427100, H01L 4108, G02B 610
Patent
active
057491321
ABSTRACT:
A method for diffusing titanium into a single-crystal lithium niobate substrate and guided wave devices produced therefrom provide improved mode match with coupled fibers. Preferably, the titanium diffusion occurs at a diffusion temperature for a time between about 8 hours and about 18 hours. Outdiffusion of lithium oxide is allowed to occur during titanium diffusion. The outdiffused region, typically at least about 25 .mu.m, is much deeper than the titanium diffusion depth, typically about 5-10 .mu.m.
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Mahapatra Amaresh
Narayanan S. Anantha
Ramar Corporation
Vo Peter
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