Data processing: structural design – modeling – simulation – and em – Modeling by mathematical expression
Patent
1997-03-14
2000-12-05
Teska, Kevin J.
Data processing: structural design, modeling, simulation, and em
Modeling by mathematical expression
703 1, 703 7, G06F 760
Patent
active
061579009
ABSTRACT:
A knowledge based, computer-aided system and method is disclosed for simulating any set of linear or nonlinear simultaneous parametric dependencies. The preferred embodiment creates a model and provides an estimate of the material properties of materials comprising thin films disposed on semiconductor materials. However the system and method are suitable for creating a model and providing an estimate of the physical properties of materials undergoing other material fabrication processes that are dependent on several parameters. The method is suitable for implementation on exisitng general purpose computers. The method involves the general steps of entering parameter values for the material being subjected to the fabrication process, interrelating the user provided parameter values with a database of stored parameter values, calculating numerical solutions for the interrelated parameter and property values according to an Estimation Routine, and providing an output of numerical and graphical data relating to the desired physical properties. The system is capable of being implemented to include a dual hierarchical feedback and feed-foreward loop where a control system uses the Estimation Routine to determine what additional data acquisition is required. Such a feedback loop could also be employed in conjunction with this method to yield an optimized value for the material properties in question.
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Broda Samuel
IntelliSense Corp.
Teska Kevin J.
LandOfFree
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