Method for making a thin-film humidity sensor for measuring abso

Details Method for making a thin-film humidity sensor for measuring abso Method for making a thin-film humidity sensor for measuring abso

1985-04-19

1986-08-05

Hall, Carl E.

Metal working

Electric condenser making

Solid dielectric type

29854, 427 79, H01G 406

Patent

active

046034552

ABSTRACT:
A thin-film humidity sensor for measuring the absolute humidity having a base electrode, a moisture-sensitive dielectric layer and a top electrode is formed at the end face of an electrically insulating bushing body by the thin-film technique. The connecting conductors are led through the bushing body and terminate in contact areas which are ground plane and polished together with the end face of the bushing body. The metal layers forming the electrodes are so shaped on application, preferably by means of perforated masks, that they each cover the contact area of the associated connecting conductor and are electrically connected thereto. The bushing body is inserted into a sleeve of a highly alloyed nickel-molybdenum compound and connected thereto in pressure-resistant manner.

REFERENCES:
patent: 3317983 (1967-05-01), De Wit et al.
patent: 4528613 (1985-07-01), Stetson et al.

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