Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1997-07-31
1999-06-01
Mathews, Alan A.
Photocopying
Projection printing and copying cameras
Step and repeat
355 72, 356375, G03B 2742, G03B 2758
Patent
active
059092726
ABSTRACT:
A stage apparatus has a stationary portion, a movable portion and a linear motor for moving the movable portion in a prescribed direction by applying thrust between the stationary and movable portions. A first supporting member supports the stationary portion with a degree of freedom in the direction of movement, and a second supporting member has an axial supporting member for supporting the stationary portion rigidly in the direction of movement and flexibly in other directions. The second supporting member is isolated from the first supporting member in such a manner that vibration will not be transmitted to the first supporting member. The stage is used to scan a master plate in a scanning-type exposure apparatus, and the first supporting member is joined to a lens barrel table on which a projecting optical system is mounted.
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Asada Katsumi
Inoue Mitsuru
Ito Hiroshi
Iwamoto Kazunori
Osanai Eiji
Canon Kabushiki Kaisha
Mathews Alan A.
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