Thermal arched beam microelectromechanical actuators

Details Thermal arched beam microelectromechanical actuators Thermal arched beam microelectromechanical actuators

1996-12-16

1999-06-01

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Thermal or pyromagnetic

310306, H02N 1100, H01G 700, F01L 100

Patent

active

059090782

ABSTRACT:
Microelectromechanical actuators include at least one arched beam which extends between spaced apart supports on a microelectronic substrate. The arched beams are arched in a predetermined direction and expand upon application of heat thereto. A coupler mechanically couples the plurality of arched beams between the spaced apart supports. Heat is applied to at least one of the arched beams to cause further arching as a result of thermal expansion thereof, and thereby cause displacement of the coupler along the predetermined direction. Internal heating of the arched beams by passing current through the arched beams may be used. External heating sources may also be used. The coupler may be attached to a capacitor plate to provide capacitive sensors such as flow sensors. The coupler may also be attached to a valve plate to provide microvalves. Compensating arched beams may be used to provide ambient temperature insensitivity.

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