Fully integrated magnetic micromotors and methods for their fabr

Details Fully integrated magnetic micromotors and methods for their fabr Fully integrated magnetic micromotors and methods for their fabr

1997-09-22

1999-06-01

Enad, Elvin G.

Electrical generator or motor structure

Dynamoelectric

Rotary

310308, 310309, 310DIG6, H02K 3700

Patent

active

059090693

ABSTRACT:
A planar fully integrated variable reluctance micromotor (10) is microfabricated on a substrate base (18). The micromotor includes a pin (19), rotor (12) with radially extending poles (16), and a stator (20) having a plurality of poles (21) configured in pairs (22) circumferentially spaced about the rotor. The rotor is microfabricated in place, or in situ, contiguous to the substrate base. The pairs of stator poles include a multilevel core (26) wrapped around a meander conductor (27) which is connected to bonding pads (32). The variable reluctance micromotor is particularly adapted to operating as a micropump (45) for conductive fluids.

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Ahn, et al., "A Planar Variable Reluctance Magnetic Micro Motor With Fully Integrated Stator and Wrapped Coils," IEEE Catalog No. 93CH3265-6, Feb. 7-10, 1993, pp. 1-5.

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