Reticle container with corner holding

Details Reticle container with corner holding Reticle container with corner holding

1996-07-24

1998-03-17

Sewell, Paul T.

Special receptacle or package

For plate or sheet

Fragile or sensitive

206453, 206706, 206740, 248154, 2483165, 269254, E65D 7302

Patent

active

057276854

ABSTRACT:
A cassette or box for containing and holding a planar substrate such as a reticle having a clamp bar coupled to corner supports by a spring or flexure and a linkage. A clamp bar is pivotally attached to bottom corner supports and a spring or flexure and linked to a top corner support, such that movement of the load bar causes the corner supports to pivot away from a reticle being held only at the corners. An elevation bar is also used to preposition the reticle in one direction. The present invention greatly facilitates the positioning and handling of a reticle as used in photolithography to manufacture semiconductor devices. Additionally, the present invention greatly reduces particulate contamination.

REFERENCES:
patent: 3615006 (1971-10-01), Freed
patent: 4422547 (1983-12-01), Abe et al.
patent: 4776462 (1988-10-01), Kosugi et al.
patent: 4886169 (1989-12-01), Ayers et al.
patent: 5154380 (1992-10-01), Risca
patent: 5161789 (1992-11-01), Rogers

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