Method and apparatus for controlling alignment of an electron be

Details Method and apparatus for controlling alignment of an electron be Method and apparatus for controlling alignment of an electron be

1981-07-30

1983-12-27

Albritton, C. L.

Electric heating

Metal heating

By arc

219121ER, 219121EW, B23K 1500

Patent

active

044233051

ABSTRACT:
An electron beam, which is applied along an axis from a source to a target, is aligned along the axis by deflecting the beam off the axis to a reference location. At the reference location, the source image of the electron beam is centered on a sensing plate through shifting the beam by an alignment yoke until the sensed current is a maximum through correction signals that are supplied to the alignment yoke. These correction signals are continuously applied to the alignment yoke when the electron beam is returned from the reference location to the position in which it is applied to the target.

REFERENCES:
patent: 3644700 (1972-02-01), Kruppa et al.
patent: 3894271 (1975-07-01), Pfeiffer et al.
patent: 3894271 (1975-07-01), Pfeiffer et al.
patent: 4243866 (1981-01-01), Pfeiffer et al.
J. Vac. Sci. Technol., vol. 12, No. 6, Nov./Dec. 1975, "Automatic Stabilization of an Electron Probe Forming System", S. Doran et al., pp. 1174-1176.

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