Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Patent
1998-08-10
2000-02-01
Mathews, Alan A.
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
355 53, 355 67, G03B 2752, G03B 2742, G03B 2754
Patent
active
06020950&
ABSTRACT:
In an exposure method of imaging/projecting, through a projection optical system, a pattern formed on a mask onto an object to be exposed, a mask is placed on an object plane side of the projection optical system, the pattern formed on the mask being constituted by a transparent portion which is almost transparent to exposure light, and a phase shift portion for producing light whose phase is shifted from that of light transmitted through the transparent portion by almost an odd number multiple of .pi., and the object is exposed while a limiting member for limiting a beam, of beams passing through a Fourier transform plane having an optical Fourier transform relationship with a pattern surface of the mask in the projection optical system, which propagates near an optical axis of the projection optical system is placed at or near the Fourier transform plane.
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Mathews Alan A.
Nguyen Hung Henry
Nikon Corporation
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