Controlled porosity sheet for thermionic dispenser cathode and m

Electric lamp and discharge devices – Electrode and shield structures – Cathodes containing and/or coated with electron emissive...

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313337, 313346DC, 427 77, 428596, H01J 114, H01J 1906, H01K 104

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043799795

ABSTRACT:
A controlled porosity sheet defining a surface for a thermionic dispenser thode and a method of manufacture. Starting with a generally flat silicon template substrate structure having an array of upstanding microposts 1-25 microns across on 5-100 micron spacings from each other, a layer of metal is deposited on the substrate to surround the microposts and cover the substrate structure to a desired depth. The metal layer is then abraded to a smooth, flat surface which exposes the microposts. Thereafter, the silicon substrate and microposts are completely etched away, leaving a metal sheet having micron-size holes therethrough.

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patent: 4254357 (1981-03-01), Haas et al.
patent: 4310603 (1982-01-01), Falce

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