Multiple-cavity variable capacitance pressure transducer

Details Multiple-cavity variable capacitance pressure transducer Multiple-cavity variable capacitance pressure transducer

1981-08-26

1983-06-28

Reynolds, B. A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

29 2541, 73718, H01G 700

Patent

active

043909256

ABSTRACT:
A plurality of recesses and interconnecting paths are etched into the surface of a silicon wafer. A plate of borosilicate glass carrying thin-film metal deposits in a corresponding pattern is electrostatically bonded to the silicon to form a multiple-cavity variable capacitance pressure transducer.

REFERENCES:
patent: 3397278 (1968-08-01), Pomerantz
patent: 4257274 (1981-03-01), Shimada et al.
patent: 4261086 (1981-04-01), Giachino et al.

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