Surface position detecting method at a predetermined and plurali

Details Surface position detecting method at a predetermined and plurali Surface position detecting method at a predetermined and plurali

1991-07-23

1992-06-23

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

356375, G01N 2186

Patent

active

051245620

ABSTRACT:
A surface position detecting method wherein a surface on which a predetermined pattern is formed is measured by use of a measuring device to obtain a surface position data related thereto and, on the basis of the obtained surface position data, the surface position of the surface being examined is detected, the method including a measuring step for relatively moving the measuring device and the surface being examined, in a direction substantially parallel to the surface being examined, and sequentially measuring different points on the surface being examined by use of the measuring device; and a detecting step for detecting the surface position of the surface being examined, in a direction substantially perpendicular thereto, on the basis of a plurality of surface position data obtained through the measuring step.

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patent: 4579453 (1986-04-01), Makita
patent: 4723845 (1988-02-01), Mizutani et al.
patent: 4780615 (1988-10-01), Suzuki
patent: 4795911 (1989-01-01), Kohno et al.
patent: 4823014 (1989-04-01), Miyawaki
patent: 4874954 (1989-10-01), Takahashi et al.

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